Electronic Chemicals > Product Purities

Trillium™ grade products meet or exceed the industry's most stringent requirements. They are typically used to manufacture IC devices with critical geometries less than 0.2 micron. This is our newest ultra-pure specification and certifies an extensive range of anions and cations. Advanced manufacturing, filtration, and analytical certification together with specialized container packaging procedures provide the highest quality product. Trillium™ grade specifications are periodically upgraded to reflect improvements to our processes. Trillium™ products are:

• Trace metallic contaminants reported at 100 parts-per-trillion or less
• Particle count certified at 0.2 micron levels
• Continually monitored using strict statistical process control methods
• Tested for a complete range of anions and cations
• Cleanroom packaged into high-purity containers using closed-fill systems

Class 1™ grade products meet or exceed industry requirements for manufacturing IC devices with critical geometries in the 0.2 micron to 0.8 micron range. This is one of our proven high-purity product lines. Advanced sampling and analytical methods guarantee consistent results. Class 1™ grade products are:

• Manufactured to strict metallic levels, typically 1 part-per-billion or less
• Particle count certified down to 0.2 micron for most products and filtered through 0.1 micron media
• Continually monitored using strict statistical process control methods
• Tested for a complete range of anions and cations
• Packaged in containers verified for chemical purity in strictly monitored closed-fill systems

Particu-Lo® grade products meet or exceed the purity requirements of most fabs. This mid-grade family of chemicals is used to fabricate semiconductor devices with critical geometries near 1.0 micron. Particu-Lo® grade products are:

• Trace Metallic levels reported in the 1 to 10 parts-per-billion range for most products
• Particle count certified at the 0.5 micron and 1.0 micron levels and filtered through 0.2 micron media, at a minimum
• Tested for critical anions and cations

Class 10® grade products offer cost-effective performance in many electronic applications and are superior to reagent grade chemicals. Class 10® grade products are:

• Characterized for metallic impurities in the 10 to 100 parts-per-billion range
• Particle count certified to 1.0 micron and filtered through 0.2 micron media
• Tested for critical anions and cations

TechPure™ grade products provide effective purity in less demanding applications. TechPure™ grade products are:

• Characterized for metallic impurities in the parts-per-million range
• Tested for assay and a limited list of anions and cations
• Packaged and certified using procedures under ISO guidelines for lot-to-lot consistency